Development of a Multi-Scale Electromigration Simulator Based on a Combination of Ultra Accelerated Quantum Chemical Molecular Dynamics and Kinetic Monte Carlo Methods Application to Cu Interconnects Lifetime Simulation
Japanese Journal of Applied Physics, 48 (2009) 04C020.
Hideyuki Tsuboi, Asami Kato, Hiromi Sato, Fumie Hasekura, Saori Oda, Hiroshi Setogawa, Chie Abe, Arunabhiram Chutia, Chen Lv, Zhigang Zhu, Ryuji Miura, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Ramesh C. Deka, Momoji Kubo, and Akira Miyamoto